SEMI認(rèn)證標(biāo)準(zhǔn)

SEMI標(biāo)準(zhǔn)中有材料（M系列）、設(shè)備（F系列）、平板顯示器（D系列）、跟蹤性（T系列）等，其中S系列規(guī)定了環(huán)境健康安全（EHS）的要求。

SEMI常見安全標(biāo)準(zhǔn)

SEMI S1 ??裝置安全標(biāo)簽   Safety Guideline for Visual Hazard Alerts

SEMI S2 ??半導(dǎo)體生產(chǎn)裝置的環(huán)境、健康、安全Safety Guidelines for Semiconductor Manufacturing Equipment

SEMI S3 ??熱化學(xué)槽的安全性 Safety Guidelines for Heated Chemical Baths

SEMI S4 ??櫥柜收納高壓氣筒的隔離／分離Safety Guideline for the Segregation/ Separation of Gas Cylinders Contained in Cabinets

SEMI S5 ??流量限制設(shè)備Safety Guideline for Flow Limiting Devices

SEMI S6 ??換氣Safety Guideline for Ventilation

SEMI S7 ??半導(dǎo)體生產(chǎn)裝置的環(huán)境、健康、及安全性（ESH）評(píng)價(jià)Safety Guidelines for Environmental,Safety and Health Evaluation of Semiconductor Manufacturing Equipment

SEMI S8 ??半導(dǎo)體生產(chǎn)裝置的人機(jī)工程學(xué)Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment

SEMI S9 ??半導(dǎo)體生產(chǎn)裝置的電氣設(shè)計(jì)驗(yàn)證試驗(yàn)Electrical Test Methods for Semiconductor Manufacturing Equipment

SEMI S10 ??風(fēng)險(xiǎn)核查Safety Guideline for Risk Assessment

SEMI S11 ??半導(dǎo)體生產(chǎn)裝置的小環(huán)境的環(huán)境、安全性及健康Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments

SEMI S12 ??裝置的去污Guidelines for Equipment Decontamination

SEMI S13 ??半導(dǎo)體生產(chǎn)裝置的操作及維護(hù)手冊(cè)Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment

SEMI S14 ??對(duì)半導(dǎo)體生產(chǎn)裝置的火災(zāi)風(fēng)險(xiǎn)評(píng)估和降低Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S15 ??有毒及易燃?xì)怏w的檢測(cè)系統(tǒng)評(píng)價(jià)Safety Guidelines for the Evaluation of Toxic and Flammable Gas Detection Systems

SEMI F47 ??電壓瞬變能力規(guī)范 Voltage Sag Standard